A micromachined piezoresistive accelerometer with axially stretched and compressed tiny beams is proposed with both much higher sensitivity and natural resonant frequency compared to conventional cantilever mass counterparts. A mechanical model is constructed to give optimized results and scaling rules. Using SOI wafer, the accelerometer is fabricated with deep reactive ion etching technique. The manufacturing process and characteristics are also described.
| 
推荐 
点击下列相关研究机构和相关文献作者，可以直接查到这些机构和作者被《中国知识资源总库》收录的其它文献，使您全面了解该机构和该作者的研究动态和历史。
