As the basic blocks in micro-electromechanical systems(MEMS), integrated circuit(IC) and lab on a chip(LOC) fields, micro/nano- patterned structures play a key role in the modern industry society. Towards the application in silicon patterning, microfluidics devices, imprinting lithography etc., this dissertation fabricated micro/nano- structures with good properties from as-synthesized photocurable polysilazane precursors by novel rapid routes using optics lithography techniques and hydrolysis treatment.
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