The paper presents the PEO-like functional film was polymerized by plasma-enhanced vapor chemical deposition (PECVD) on P-Si(100) surface with precursor EGDME and diluted Ar in continuous wave (CW) and pulse plasma mode. We explored the effect of plasma parameter such as the discharge power, working pressure, the discharge mode on the film properties. The structure of coatings was analysed by Fourier transform infrared (FTIR) spectroscopy, contact angle measurement and Atomic Force Microscope (AFM). And we ...