Due to the nonlinear coupled energy domain behavior of MEMS (Micro Electro Mechanical System) devices, the development of MEMS CAD tools becomes a more challenging task. The coupled relevant field quantities (mechanical, thermal, electric, magnetic, optical, chemical, etc.) are consistently described by a set of time-dependent partial differential equations, direct simulation based on fully meshed structures involves thousands of degrees of freedom. In order to perform efficient prediction on system level, ...
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