Nanometer-sized clusters of yttrium oxide and zirconium oxide, with a Incan crystal size of 25 urn and 14 urn respectively, were prepaid by a chemical method in solution. Then the corresponding nanophase compacts were obtained in atmosphere.The EXAFS characterhation of nanophase oxides with different compacting pressure were discussed and compared with that of nanophase metal materials. The results show that, in nanophase oxide, the composition of crystal boundaries is mostly consistS of oxygen atoms.