The Binary Optics Elements(BOE) Laser Direct Writing device is the key device which is used to fabricate Binary Optics Elements. The motion control system of the device is a precision four-axis trace control system. Two-Dimension or three-dimension motion can be realized by the system to produce all kinds of BOE. Because of long distance and high accuracy, making the device will include photolithograph, precision mechanic, 3-dimension precision positioning, focusing, leveling and figure inputting technologi...