Recently, nanostructured silicon as templates in creating other nanomaterials has been widely studied. On the one hand, nanostructured silicon is compatible with conventional silicon microtechnology. So silicon-based nanomaterials fabricated on nanostructured silicon template can be applied in electronic and optical device in future. On the other hand, hiring unique morphology, structure and properties of nanostructured silicon, new specially patterned, structured or functionalized nanomaterials can be prep...