【作者】 杜小振； 褚金奎； 朴相镐； 张海军；

【Author】 Du Xiaozhen Chu Jinkui Piao Xiaogao Zhang Haijun Research Centre for Micro -system Technology, Dalian University of Technology. Dalian, 116024

【机构】 大连理工大学微系统研究中心；

【摘要】 微机电系统(MEMS)微型化过程中,要求电源装置也必须向微型化发展。在现有微电源研究基础上,结合微型硅悬臂梁的力学分析以及压电晶体材料压电效应特性,提出一种新的压电陶瓷(PZT)微型硅悬臂梁发电装置。借助微型硅悬臂梁质量块的振动和PZT的正压电效应,实现振动机械能向电能转换。该装置结构简单、体积小、质量小,可以用MEMS集成加工工艺实现结构加工,因此与其他微型MEMS器件可以集成在一个基础上。更多还原

【Abstract】 Recently the microelectromechanical systems(MEMS) becomes more and more smaller, which needs similar scaling power sources. Based on the research of many kinds of micro -batteries power, mechanics analysis on micro cantilever in MEMS and the piezoelectric effects of piezocrystal, a new generating electricity set by micro PZT silicon cantilever was presented. The vibrational energy can be transformed into electricity energy by this device using the direct piezoelectric effects of PZT. The advantages of this generator are subminiature and simple. It also can be integrated with other MEMS into one substrate by integrated processing technology to realize structure fabrication.更多还原