【作者】 苑伟政；

【Author】 Chang Honglong Yuan Weizheng Ma Binghe Micro/Nano System Laboratory, Northwestern Polytechnical University

【机构】 西北工业大学微/纳米系统实验室；

【摘要】 针对微机电系统设计存在多学科交叉、周期长等问题,提出了“自顶向下”设计与“自底向上”修正的双向微机电系统集成设计方法,并以微惯性器件为典型对象讨论了所涉及的关键技术。在此基础上构建了微机电系统集成设计平台,平台可以实现系统级、器件级和工艺级的多设计入口以及全参数化驱动的微机电系统设计。并以硅微加速度计为例对该设计思想和平台进行了验证。更多还原

【Abstract】 An Integrated design methodology based on "Top-down" design and "bottom-up" verification is proposed to solve the problems of MEMS design such as multi-disciplinary and long design period. The key technologies involved are discussed in the case of the inertial MEMS device design. An integrated design platform MEMS Garden 3.0 is built with the technologies, which can support the MEMS design driven by all parameters in every level of system, device and process from chosen entrances. Finally, a micro accelerometer design is carried out under the platform to Drove the correctness of the idea.更多还原