【作者】 李红轩； 徐洮； 陈建敏； 周惠娣； 刘惠文；

【Author】 Li Hongxuan, Xu Tao, Chen Jianmin, Zhou Huidi, Liu Huiwen (State Key Laboratory of Solid Lubrication .Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences,Lanzhou,730000,China)

【机构】 中国科学院兰州化学物理研究所固体润滑国家重点实验室；

【摘要】 利用直流-射频-等离子体增强化学气相沉积技术在单晶硅表面制备了纳米类金刚石薄膜。采用原子力显微镜、Raman光谱、红外光谱研究了薄膜的表面形貌和微观结构,并初步考察了薄膜的摩擦学性能。结果表明,制备的薄膜具有典型的类金刚石结构特征,该薄膜具有良好的抗磨减摩性能。更多还原

【Abstract】 Nanoscale diamond-like films were successfully deposited on Si substrate by DC-RF-PECVD method. The surface morphology, microstructure and tribological properties of DLC films were investigated respectively by atomic force microscopy, Raman spectroscopy, infrared spectroscopy and UMT-2MT friction and wear testing. The results showed that the films produced by DC-RF-PECVD had typical diamond-like characteristics and good friction-reducing and antiwear behavior.更多还原