【摘要】 主要介绍微机电系统(MEMS)中几种测量薄膜力学性能的方法,如纳米压入法、单轴拉伸法、基底弯曲法、微旋转结构法,比较了各种方法的优缺点。这对MEMS器件的设计与研究具有重要意义。更多还原

【Abstract】 Some methods of measuring mechanical properties of thin film in Micro-electromechanical systems are intro-duced including nanoindentation,single axial tension,wafer curvature,micro rotating structure,etc.Their advantages and disadvantages are compared.It is useful for the design and researchment of MEMS devices.更多还原