【摘要】 本文利用中心电极射频感应等离子体对金属管件内壁进行表面改性处理,验证了该方法的合理性以及可行性.利用该方法制备出了类金刚石(DLC)薄膜,为管型和瓶型样品的内壁强化提供新的手段.更多还原

【Abstract】 Inner surface of a metal tube was modified by radial frequency inductively coupled plasma from a central electrode.The rationality and feasibility of the method was tested.And diamond like carbon(DLC) film was prepared successfully,which can provide a new method for inner surface modification of tube or bottle type samples.更多还原