【摘要】 用射频溅射的方法在强立方织构的CeO2/YSZ/Y2O3/NiW衬底上制备了YBCO超导层。温度、气压等因素对超导层的外延生长有重要影响。在基片温度大于780℃,气压在11~160 Pa之间,都有NiWO4化合物生成;在退火吸氧过程中,金属基底被氧化。最终在温度780℃,气压100 Pa的条件下,制备出了纯(00l)取向的YBCO薄膜,其平面内φ扫描半高宽小于10°,超导转变温度为87.2 K,传导电流为11 A。更多还原

【Abstract】 The YBCO superconducting layers were deposited by RF magnetron sputtering on biaxially textured Ni-W substrates,using CeO2/YSZ/Y2O3 buffer layer architecture.The factors,such as substrate temperature,pressure had great influence on the epitaxial growth of YBCO.The NiWO4 peaks were observable during YBCO deposition at the substrate temperature over 780 ℃,sputtering pressure from 11 Pa to 160 Pa.In addition,the metallic substrates began to be oxidized in the process of annealing.At 780 ℃ under the total pressure of 100 Pa,the pure(00l) orientation film was obtained,and the full width half maximum(FWHM) of the φ-scan of YBCO was less than 10°.The critical temperature of YBCO film was 87.2 K,and its transport current was 11 A.更多还原