【摘要】 研制了150kHz中频交流脉冲电源,给出了中频交流脉冲电源的设计思路和实现方案.该电源采用全桥逆变拓朴电路、PWM控制方式、输出功率叠加的方案,具有输出变压器原边平均电流和副边峰值电流的过流保护功能.其输出峰值电压0~1200V连续可调,频率1~150kH z可调,脉宽占空比10%~40%可调,输出平均电流0~5A,最大输出功率5kW.利用该电源进行了等离子体化学气相沉积和反应溅射实验,证明该电源各项指标运行正常,工作稳定,具有良好的应用价值.更多还原

【Abstract】 We develop a 150kHz AC intermediate frequency pulsed power supply.Full bridge inversion topological circuit,PWM control method and output power superposition are adopted,over-current protection of the output transformer original side average current and side peak current included.Output voltage 0~1 200V continuous-available,frequency 1~150kHz available,pulse width duty 10%~40% available,output average current 0~5A,output peak power 5kW.The design thinking and implement way of AC intermediate frequency pulse power supply will be discussed in detail.PCVD and reactive sputtering experiments indicated that the power supply reached the design aim,each performance index operating normally,working stably and having high practical value.更多还原