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基于虚拟仪器的氦质谱检漏仪监控系统设计
Design of the Monitoring System for Helium Mass-Spectrometer Leakage Detector Based on Virtual Instrument
【摘要】 基于虚拟仪器技术,使用LabVIEW开发平台,设计了应用于氦质谱检漏仪的监控系统。利用计算机、数据采集卡和单片机,实现了数据存储功能,达到了自动控制检漏仪部分动作的目标。该系统提高了氦质谱检漏仪的自动化水平,提高了真空系统检漏的效率。
【Abstract】 A monitoring system for helium mass-spectrometer leakage detector was designed in this paper.By the use of computer,data acquisition card and MCU,several functions including storing data,controlling the operation of leakage detectors in a measure automatically have been realized.The system can raise the level of automation of helium mass-spectrometer leakage detector and improve the efficiency of leakage detecting on vacuum system.
【关键词】 LabVIEW;
虚拟仪器技术;
氦质谱检漏仪;
监控系统;
【Key words】 LabVIEW; Virtual instruments technology; Helium mass-spectrometer leakage detector; Monitoring system;
【Key words】 LabVIEW; Virtual instruments technology; Helium mass-spectrometer leakage detector; Monitoring system;
- 【文献出处】 真空电子技术 ,Vacuum Electronics , 编辑部邮箱 ,2007年03期
- 【分类号】TP216;TP277
- 【被引频次】1
- 【下载频次】136