【摘要】 在详细论述了精密长光栅与激光测振仪OFV-5000的测量原理和方法之后,将二者结合设计了一种X-Y工作台定位误差的动态测量与补偿方法,并且通过实验验证了该方法的有效性。更多还原

【Abstract】 On the basis of discussing the principle and measurement method of precise len gth grating and laser vibrometer controller OFV-5000, a method of the dynamic me asurement and compensation of position errors of X-Y table is designed by co mbining the above mentioned two instruments, and the experiment verifies the eff ectiveness of the method.更多还原