【摘要】 将电化学加工的原理应用于微加工领域,具有可加工材料的范围广、无宏观加工作用力、工具阴极无损耗、加工表面质量好、无内应力、工艺多样化、可实现批量加工和三维加工等许多优点。从加工原理出发,分析了实现电化学微加工的前提条件。从基础理论研究和应用技术研究两个方面介绍了近年来国内外在电化学微加工领域的一些新进展,总结了实现电化学微加工的关键技术。更多还原

【Abstract】 Electrochemical micromachining(EMM) is a promising machining technique in micromachining applications,since it offers several advantages which include applicability to a wide range of materials,absence of machining forces and residual stresses,no tool wear,good surface finish, adaptability to various processes,mass production,and ability to machine complex 3D micro features.This paper addressed the important factors that were necessary for achieving EMM based on its fundamental principles.It reviewed the recent advances in EMM in terms of its fundamental theories and practical applications.The paper also presented the critical issues that were required to realize EMM and were of importance to the future development in EMM and its infrastructures.更多还原