【摘要】 基于气体电晕放电原理,利用纳米碳管独特的物理结构和尖端发射效应,提出了一种新型的纳米碳管离子型气敏传感器.采用阳极氧化铝模板法生长的定向纳米碳管阵列所构成的传感器,其纳米碳管和电极是一体的,简化了器件结构和工艺.在外加直流电压的激励下,纳米碳管顶部形成很强的非均匀电场,在电压相对低的情况下能很容易地电离气体,根据气体的击穿电压和放电电流来实现对单一气体和确定性组合气体的检测.实验中还分析了温度、湿度对传感器的影响,对该传感器的性能也作了评价.实验结果表明,该传感器具有选择性好、体积小、响应时间快、灵敏度高、稳定性好、室温操作等优点,而且实现方便,操作简单,有较大的实用价值.更多还原

【Abstract】 A novel gas ionization sensor based on corona discharge using carbon nanotubes(CNTs) was proposed.The sensor utilizes the unique physical structure and the field emission effect of CNTs.Due to adopting the method of anodic aluminum oxide(AAO) template to grow aligned CNTs,the electrode and CNTs were integrated,so the gas sensor simplified its structure and processing techniqus.With controlled DC voltage applied to the CNTs electrode,the sharp tips of CNTs generated high electric fields,so corona discharge was produced easily at low voltages.For different gases having their unique breakdown voltage and discharge current,it is possible to identify one gas or certain mixture gases.The influences of temperature and humidity were discussed,and the performance of the sensor was also evaluated.Experiments show that the CNTs gas sensor has small size,fast response,good sensitivity and selectivity,and is convenient to be operated at room temperature and feasible for gas detection.更多还原