【摘要】 真空溅射镀膜技术及设备在当今和未来都拥有十分广阔的应用领域和发展前景。本文针对真空溅射镀膜机采用继电器-接触器的控制系统进行了设计与研究,对控制系统的工艺流程、要求、及控制过程进行了详细的分析和论述。本文对同类产品的设计与开发具有一定的指导作用,同时对一般的工业生产也具有较高的实用价值。更多还原

【Abstract】 The technology and equipment of the vacuum sputtering coating have the extremely broad application and the development in the future.In this paper,the relay-contact device of control system of the vacuum sputtering coater is designed and researched,the technical process,the request,and the controlled process of the control system is analyzed and researched comprehensively.This article has certain instruction to the design and the development of similar product,at the same time,it also has a higher practical value to the general industrial production.更多还原