【摘要】 提出了一种表面硅微器件结构设计方法,解决了目前微机电系统(MEMS)结构设计中直观性差、工艺难度大等问题．该方法将三维特征建模的设计思想运用到MEMS设计中,在建立三维特征库的基础上实现了器件结构的快速直观设计．通过三维设计软件SolidWorks的用户接口开发的应用程序不仅实现了从器件结构中自动提取掩膜版和工艺流程,而且消除了人工设计掩膜版和工艺流程的繁琐过程．应用实例表明,与传统的通过掩膜版设计MEMS器件结构的方法相比,该方法简洁、高效,更符合设计者所看即所得的思维方式．同时,SolidWorks软件作为开发MEMS辅助设计工具的基础平台,可以省去开发几何造型模块的任务,从而为新一代MEMS辅助设计工具的开发提供了新的思路．更多还原

【Abstract】 To improve straightforwardness and reduce process complexity of micro-electro-me- chanical systems(MEMS)design,a new design scheme is proposed for surface micromachined device.Based on the established three-dimensional features,the solid geometric models of MEMS devices were constructed efficiently with SolidWorks.Simultaneously,the mask layouts and process flow were automatically generated with the developed program based on the application programming interfaces of SolidWorks.A practical example shows that this method enables to design MEMS geometric models efficiently in a straightforward environment without tedious fab- rication process.And SolidWorks serving as the basic development platform greatly reduces com- plexity of developing MEMS CAD tools.更多还原