【摘要】 建立了以制作工艺为基础、适合多层薄膜微结构的热应力的计算公式。在Stoney方程相同的条件下,验证了所建模型的准确性。所建模型应用于多层微悬臂梁结构在残余应力作用下的形变计算,与实验测量结果的对比表明,误差在10%以内,说明所建模型具有非常好的实用性,可以为多层薄膜微结构设计和优化提供理论依据。更多还原

【Abstract】 A calculation model of the thermal stresses in a microstructure fabricated by multilayer thin films was established depending on the processing steps and it was verified by Stoney’s equation under the same conditions.Furthermore,it was applied to calculate the deformation of a micro-cantilever fabricated by multilayer thin films under residual stresses.The calculated results were compared with the experimental results to show that their difference is less than 10%.Therefore,the model is applicable and can provide a theory foundation for designing and optimizing of the microstructure fabricated by multilayer films.更多还原