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蓝宝石衬底SnO₂:Sb薄膜的制备及结构和光致发光性质

Structural and photoluminescence properties for SnO₂:Sb films prepared on Al₂O₃ substrate

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【Author】 Feng Xian-Jin 1)Ma Jin 1) Ge Song-Hua 2)Ji Feng 1)Wang Yong-Li 1)Yang Fan 1)Ma Hong-Lei 1)1)(School of Physics and Microelectronics,Shandong University,Jinan 250100,China)2)(Department of Physics,Qingdao University of Science and Technology,Qingdao 266061,China)

【机构】山东大学物理与微电子学院；青岛科技大学物理系；山东大学物理与微电子学院济南250100；济南250100；青岛266061；

【摘要】用射频磁控溅射法在蓝宝石(0001)衬底上制备出锑掺杂的氧化锡(SnO2:Sb)薄膜.对制备薄膜的结构和发光性质进行了研究.制备样品为多晶薄膜,具有纯SnO2的四方金红石结构.室温条件下对样品进行光致发光测量,在334nm附近观测到紫外发射峰,并对SnO2:Sb的光致发光机制进行了研究.更多还原

【Abstract】 The SnO₂:Sb films have been prepared on sapphire（0001）substrates by radio frequency magnetron sputtering method.The structural and photoluminescence（PL）properties of the films were investigated.The prepared samples are polycrystalline films with rutile structure of pure SnO₂.The photoluminescence of the samples was measured at room temperature.An ultraviolet luminescence peak near 334 nm was observed for the first time and the corresponding PL mechanism was investigated.更多还原