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γ-LiAlO₂上非极性ZnO薄膜制备及其光谱性质研究

Fabrication of nonpolar ZnO film on γ-LiAlO₂ substrate and its photo-luminescence properties

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【Author】 Zhou Jian-Hua 1)2)Zhou Sheng-Ming 1)Huang Tao-Hua 1)2)Lin Hui 1)2)Li Shu-Zhi 1)Zou Jun 1)2)Wang Jun 1)Zhang Rong 3)1)(Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sicences,Shanghai 201800,China)2)(Graduate School of Chinese Academy of Science,Beijing 100049,China)3)(Physics department of Nanjing University,Nanjing 210093,China)

【机构】中国科学院上海光学精密机械研究所；南京大学物理系上海201800中国科学院研究生院；北京100049；上海201800；上海201800中国科学院研究生院；南京210093；

【摘要】利用激光脉冲沉积(PLD)技术在(302)γ-LiAlO2衬底上成功生长了非极性的a面(11■0)ZnO薄膜.衬底温度为350℃时,薄膜是混合取向(a向和c向),以c面ZnO为主,且晶粒尺寸分布很宽;提高温度达500℃,薄膜变为单一的(11■0)取向,摇摆曲线半高宽0.65°,晶粒尺寸分布趋窄,利用偏振透射谱可以明显看出其面内的各向异性.衬底温度650℃下制备的样品晶粒继续长大,虽然摇摆曲线半高宽变大,但光致发光谱(PL)带边发射峰半高宽仅为105meV,比在350℃,500℃下制备的样品小1/5.更多还原

【Abstract】 Nonpolar a-plane（11■0）ZnO films were successfully grown on（302）γ-LiAlO₂ substrate by pulsed laser deposition.When the temperature of the substrate was 350℃,the film was mix-oriented（a and c）with a wide distribution of crystal grain size,and the c-plane ZnO was dominant.When the temperature of the substrate was 500℃,pure（11■0）ZnO film was formed,with the FWHM of ZnO（11■0）rocking curve ～0.65° and the grain size distribution narrowed.Its in-plane anisotropy was demonstrated by polarized transmission spectrum.The FWHM of the peak of near band emission in the PL spectra was found to be only 105meV for the sample with substrate temperature of 650℃,indicating the large size and uniform distribution of crystal grains which was also confirmed by AFM.更多还原