【摘要】 为探索大直径单晶体生长系统的最佳旋转波形和控制参数,研制开发了晶体坩埚多波形旋转控制系统。主要部件采用嵌入式单片机、交流伺服电机及D/A转换器等。提出了一种用D/A转换器实现交流伺服电机高精度调速的优化算法,提高了控制精度,简化了编程方案。试验证明该系统性能可靠,工作稳定。现已正式投入使用。更多还原

【Abstract】 A new control system of the crucible multi wave rotation has been developed, in order to look for prime rotation wave and control parameter of crystal growth. Main components of the system are the Embedded MCU (Micro Controller Unit), and AC servo-motor and DAC, and so on. A new arithmetic of control servomotor with DAC is put forward and used. It increases the control preci-sion, and simplifies the programmable method. The test run of the crystal system proved that this control system is stable and de-pendable.更多还原