【摘要】 采用射频磁控溅射方法在Si(100)基底上制备了一系列ZrC/ZrB2纳米多层膜和ZrC,ZrB2单层薄膜.通过扫描电子显微镜(SEM),MS-T3000摩擦磨损仪及表面轮廓仪(XP-2)研究了薄膜的微结构和耐磨性.结果表明,多层膜的界面清晰,调制周期性好,周期为3.52 nm的多层膜摩擦系数最小,约为0.24;ZrC/ZrB2纳米多层膜的耐磨性优于ZrC和ZrB2单层薄膜;ZrC/ZrB2多层膜耐磨性提高的主要原因是,调制结构中大量界面的存在,提高了薄膜的韧性,从而增强了薄膜的耐磨性能.更多还原

【Abstract】 ZrC/ZrB2 multilayered coating and monolithic ZrC and ZrB2 coatings on Si(100) were prepared by r.f.magnetron sputtering system.Scanning electron microscopy(SEM),MS-T3000 friction wear tester and profiler(XP-2) were employed to investigate the microstructure and wear resistance of the coatings.The results indicated that nanoscaled coating possessed clear multilayered structure and good modulation period.Multilayer sample with Λ = 3.52 nm had the smallest friction coefficient of 0.24.Tribological experiment showed that nanoscale ZrC/ZrB2 multilayer film exhibited better wear resistance than that of monolithic ZrC and ZrB2 coatings.Improvement of the wear resistance of multilayer nanoscaled coating was mainly due to the increase of coatings toughness induced by the interfaces.更多还原