【摘要】 对利用射频磁控溅射及真空退火方法在(100)硅晶片衬底上制备的纳米晶碳化硅(SiC)薄膜,用纳米压痕仪进行了力学性能测试分析。纳米压痕技术测试给出两块SiC薄膜样品I和II的弹性模量/硬度分别约为106GPa/9.5GPa和175GPa/15.6GPa。纳米划痕技术测试两块SiC薄膜的摩擦系数分别约为0.02~0.15和0.05~0.18,显示出良好的润滑性能;对薄膜的临界附着力等进行测量以评价膜基结合强度,分析了划痕过程中薄膜近表面弹塑性变形和断裂信息。在原子力显微镜下对SiC薄膜样品的初始表面及残余压痕和划痕形貌进行了观察分析,与测试结果相符。综合比较,样品II的整体性能优于样品I。本文中薄膜的弹性模量和硬度值较低可归因于制膜技术的不同和表层碳含量偏高。更多还原

【Abstract】 The nanocrystal SiC films with thickness of 600nm were fabricated on Si(100) by RF magnetron sputtering and then annealed in a vacuum annealing system.The mechanical properties of two SiC films were evaluated with a nanoindenter.The values of the hardness and elastic modulus of the films are 106GPa/9.5GPa and 175GPa/15.6GPa respectively obtained from the nanoindentation tests.The frictional coefficients of the two specimens are around 0.02~0.15 and 0.05~0.18 respectively by nanoscratch measurements.The critical adhesion forces were determined to evaluate the adhesion between the SiC coatings and Si substrates,based on the analysis of the near-surface elastic-plastic deformation and rupture information during scratch.Also an AFM was employed for the morphological analysis of the initial surface of the specimens,as well as the residual indent and residual scratch on the coatings,which coincided with the test results above.The present studies demonstrate that SiC film II is stronger and more abrasion resistant than SiC film I.The lower values of Young′s modulus and hardness of the film can be attributed to the film preparation technology as well as the higher carbon content suggested by AES analysis.更多还原