【摘要】 为了适合集成电路后部工序——老炼筛选测试工艺的生产管理特点,提高其生产效率,在前部工序IC-CAM系统基础上设计开发了新的集成电路制造后部工序计算机辅助制造系统。对老炼筛选测试工艺IC-CAM的系统结构,系统中的主体数据表结构及为保证数据完整性一致性的事件触发器的设计,以及部分界面设计技术等进行了详细分析与介绍。该系统已完成现场安装调试,投入试运行,所有功能达到预定设计要求,提高了IC后部工序的生产效率。更多还原

【Abstract】 In order to adapt to the manufacturing management characters of IC posterior processes,mainly including aging,selecting and testing processes,to improve their manufacturing efficiency,the new generation IC-CAM system focusing on the posterior processes of integrated circuit manufacturing is designed on the basis of the developed front end processes IC-CAM system.The structure of IC- CAM system for IC aging,selecting and testing processes,the design of major data structure,the event triggers which ensure the com- pletion and consistency of the data,and parts of the interface design are analyzed and discussed in details.The whole system has finished its installation and adjustment,and is used in the practical manufacturing with all the functions meeting the design specs,then the manu- facturing efficiency is improved.更多还原