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等离子体源离子注入柱形空心阴极内表面的蒙特—卡罗模拟
MONTE CARLO SIMULATION OF IONS INSIDE A CYLINDRICAL BORE FOR PLASMA SOURCE ION IMPLANTATION
【摘要】 采用蒙特—卡罗方法对柱形空心阴极的氮离子(N+,N2+)注入进行了研究,考虑了氮离子与中性原子的电荷交换和弹性碰撞,计算了氮离子在不同压强下鞘层内表面的能量分布及角分布.
【Abstract】 The ions(N+,N+2)transport processe at the interior sidewall of a large cylindrical bore is studied by using Monte Carlo simulation.The ion-neutral charge exchange and elastic collision are taken into account.We calculate the energy distribution and angular distribution under different pressure.
【关键词】 等离子体源离子注入;
柱形空心阴极脉冲放电;
蒙特卡罗模拟;
【Key words】 monte carlo simulation; inside acylindrical bore; plasma source ion implantation;
【Key words】 monte carlo simulation; inside acylindrical bore; plasma source ion implantation;
- 【文献出处】 山东师范大学学报(自然科学版) ,Journal of Shandong Normal University(Natural Science) , 编辑部邮箱 ,2007年01期
- 【分类号】O539
- 【下载频次】142