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LiAlO₂衬底上ZnO薄膜的溶胶-凝胶法制备和表征

Characterization of ZnO Thin Films Synthesized on LiAlO₂ Substrates by Solgel Method

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【Author】 LIN Hui1,2,SONG Tao3,ZHOU Jian-hua1,2,HUANG Tao-hua1,2,XIA Guo-dong1,2,ZOU Jun1,2,DONG Ya-ming3,WANG Jun1,ZHOU Sheng-ming1(1.Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800,China;2.Graduate School of the Chinese Academy of Sciences,Beijing 100039,China;3.Shanghai Normal University,Shanghai 200234,China)

【机构】中国科学院上海光学精密机械研究所；上海师范大学；中国科学院上海光学精密机械研究所上海201800；中国科学院研究生院；北京100039；上海200234；上海201800；

【摘要】采用溶胶凝胶法在LiAlO2(302)衬底上制备了ZnO薄膜。用X射线衍射(XRD)和扫描电镜(SEM)对样品的结构和形貌进行了表征。XRD结果表明,随着热处理温度的升高(350℃、450℃、550℃、600℃、800℃),所得到的薄膜分别为单相ZnAl2O4(350℃),ZnAl2O4和ZnO的混合相(450℃)以及单相的ZnO(550℃、600℃、800℃),并且ZnO薄膜c轴择优取向的生长趋势随温度升高相应明显。SEM图像显示,随着热处理温度的升高,ZnO薄膜的粒径相应变大。更多还原

【Abstract】 In this paper,ZnO thin film was deposited on LiAlO2(302) substrates by Sol-gel method.X-ray diffraction(XRD) shows that by enhancing the post-processing temperature(350℃,450℃,550℃,600℃,800℃),we have obtained single ZnAl2O4 phase(350℃),mixed phase of ZnAl2O4 and ZnO(450℃),as well as single phase ZnO(550℃,600℃,800℃),respectively.It also can be seen that the c-axis growth tendency also became stronger under higher temperatures.SEM images show that the sizes of the polycrystalline ZnO thin film particles become larger with the enhanced post-processing temperature.更多还原