【摘要】 提出利用光刻定位自组装填充的方法制作纳米金属列阵.在平面基板上通过光刻手段制作具有列阵微区的定位模板,再利用单分散聚苯乙烯纳米球在微区里进行自组装,得到单层规则排布的纳米球结构;进一步沉积金属后,通过去牺牲层工艺去除球体,可得到呈六角形分布的纳米金属列阵结构;最后对获得的纳米金属列阵结构的形貌和光学性能进行分析,给出金属纳米列阵结构的电子显微镜照片和消光谱.更多还原

【Abstract】 An approach for self-assembling nanosphere material in the micro section formed by photolithography was proposed. An anchor template with micro-frame array was fabricated through photolithography, then a single layer of separate polystyrene nanospheres was aligned in the micro-frame; After a single layer of metal was deposited on the top of the assembled structures and the lift-off was taken, the nano-metal array with the hexagon shape was achieved. The optical properties of the nano-metal array structure was measured, and a sharp spectrum curve shows the absorption caused by plasma resonance of the nano-structure. The SEM and extinction of nano-mental array structure were given.更多还原