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飞秒激光与金膜作用的脉冲累积效应(英文)

Pulse Incubation Effect on Interaction of Femtosecond Laser and Au Film

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【Author】 NI Xiao-chang1,2, SUN Qi2, WANG Ching-yue2, WU Yin-zhong2, YANG Li2, JIA Wei 2, CHAI Lu2(1.Electronic Engineering Department, Tianjin University of Technology and Education, Tianjin 300222, China;2.Key Laboratory of Opto-electronic Information Science and Technology, Ministry of Education, School of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin 300072, China)

【机构】天津工程师范学院电子工程系；天津大学精密仪器与光电子工程学院；天津大学精密仪器与光电子工程学院天津300222；光电信息技术科学教育部重点实验室；天津300072；

【摘要】采用1kHz飞秒激光(脉宽148fs,中心波长775nm)对石英衬底的金膜的烧蚀过程进行了研究.单脉冲与多脉冲的烧蚀阈值可以通过烧蚀点的直径平方与所用的激光能流的关系曲线获得.通过累积能流和烧蚀脉冲数的关系,可以得到金膜的脉冲累积因子.采用飞秒激光加工材料的一些特点可以合理解释单脉冲阈值附近获得的一些实验现象.更多还原

【Abstract】 Ablation process of Au film on silica substrates was studied with 1 kHz femtosecond lasers (pulse duration 148 fs, center wavelength 775 nm). The thresholds for single and multi pulses can be obtained from the relationship between squared diameter of the ablated craters and the laser fluence. From the plot of accumulated laser fluence and the number of laser pulses, pulse incubation coefficient of Au film was obtained. Some experimental results were obtained around the single pulse threshold at the same time, and some experimental phenomena were explained with the characteristics of femtosecond laser micromachining.更多还原

【关键词】飞秒激光；脉冲累积效应；激光微加工；烧蚀阈值；
【Key words】 femtosecond laser； pulse incubation effect； laser micromachining； ablation threshold；

【基金】教育部重大研究项目(10410);国家自然科学基金资助项目(60608004);天津市科技攻关培育项目(043103911);天津工程师范学院项目(KYQD06001);天津工程师范学院科研发展基金资助项目(KJ-JH2007015)

【文献出处】纳米技术与精密工程 ,Nanotechnology and Precision Engineering , 编辑部邮箱 ,2007年02期

【分类号】TN249
【被引频次】5
【下载频次】268

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