【摘要】 音圈电机是一种广泛应用于IC装备的高精度驱动元件,具有小惯量,高频响,以及收敛快的控制特性。本文采用理论推导和试验辨识相结合的方法研究了音圈电机的控制模型,详细介绍了运用LABVIEW软件对音圈电机系统进行系统辨识的方法,其中包括参数辨识中最小二乘法的基本原理,激励信号施加和响应信号的数据处理以及模型辨识算法的Labview程序编制,并对辨识的模型进行了验证。结果对研究IC封装过程的高精度控制算法有重要的参考价值。更多还原

【Abstract】 The Voice Coil Motor (VCM),which characterized as small inertia,high frequency response and fast convergence, is widely applied in high precision motion control in IC Packaging device. In this paper,an integration approach of theory analysis and experimental identification is presented,and the process of model identification of voice coil motor with Labview software is introduced in detail. It includes the basic principle of Least Square in parameter identification,data processing of the stimulus and response signal,the Labview programming on model identification arithmetic and model verification. The result of this paper is valuable for the research of high precision control arithmetic in the IC packaging.更多还原