【摘要】 采用柱状靶磁控溅射系统制备Al/AlN纳米多层膜,采用纳米压痕仪测量Al/AlN纳米多层膜的纳米硬度,在UMT-2M型摩擦磨损试验机上评价其摩擦磨损性能.结果表明:当AlN层较厚时,薄膜在很短时间内被磨穿;调节Al/AlN层厚比为2.9/1.1时,薄膜的摩擦磨损性能明显提高;当保持Al/AlN层厚比为2.9/1.1、变化多层膜的调制周期时,薄膜的摩擦系数较低,但硬度较低的薄膜由于承载能力不够,不能够保持优良的摩擦磨损性能.更多还原

【Abstract】 Al/AlN multilayers were prepared by cylindrical DC magnetron sputtering method.The hardness of the Al/AlN multilayer films was determined using a nano-indentation tester.The wear properties of the films were measured by a UMT-2MT tester in reciprocating mode.The tribological properties of the Al/AlN multilayers showed obvious enhancement in the Al/AlN layer thickness ratio of 2.9/1.1 compared to the thick AlN layer in modulation period.With the same Al/AlN layer thickness ratio but varying modulation period,the film exhibited low friction coefficient,but it also exhibited poor tribological performance at high load due to its low hardness.更多还原