【摘要】 球基微操作器是一种广泛应用于微纳米精密作业的微机器人系统,由基座、微操作球和顶端嵌有红宝石球的3根四分压电陶瓷管组成。基于此,通过驱动压电陶瓷管弯曲或摆动,依靠红宝石球与微操作球间惯性摩擦形成的相对位移实现微操作球3自由度的运动。这种摩擦运动中存在粘滑现象,粘滑驱动带来的非线性导致球基微操作器动力学性能复杂。在简化球面高副连接的条件下,建立具有粘滑特性的微操作器系统动力学模型。基于动态摩擦模型,运用数值方法分析多个参数对微操作器运动性能的影响,通过仿真手段完成模型验证。进行微操作器运动测试试验,进一步验证所建立的动力学模型的正确性和有效性。更多还原

【Abstract】 A spherical micromanipulator is a micro robotic system largely applied to the micro/nano precision positioning, which is composed of a seat, a micro-ball and 3 piezoelectric tubes with ruby balls on the top. Rotations with 3-DOFs of the micro-ball are achieved with the relative displacements brought by the frictions between the ruby balls and the micro-ball. The stick-slip effect exists in this friction movement, whose nonlin- ear characteristic leads to the serious complication of the sys- tem dynamics. A dynamic model of the micromanipulator with stick-slip characteristic is established under the condition of simplifying spherical higher pair joints. Based on the dynamic friction model, a method of numerical analysis is used to value the effects played by several parameters. The dynamic model is demonstrated by simulations. The rotation experiment is also done, and the validity of the micromanipulator dynamic model is further proved by the results.更多还原