【摘要】 根据超精密非球面补正加工的要求,应用误差理论及其数据处理方法对其测量数据进行了分析研究,建立了优化数学模型,采用Levenberg-Marquardt(LM)优化迭代方法对数学模型进行参数拟合求解。在VC++环境下实现该算法的程序,得出形状误差PV(Peak-Valley)值。通过分析误差曲线图,来验证优化的光学参数的正确性。实例计算表明该算法能很好的应用于超精密非球面镜面形状误差分析,为评价超精密非球面镜的加工质量和后续的补正加工提供了理论依据。更多还原

【Abstract】 According to the requirement of compensatory machining the ultra-precision aspheric lens, the error theory and the data processing method have been applied to the measuring data for research and aualysis, the suitable mathematic model for optimization was established, and the Levenberg-Marquardt (LM) optimal iterative method was adopted to solve the mathematic equation with fitting the parameters. On the VC++ development platform the algorithm program and also the PV value of measuring data error was derived by analyzing the Error-Curve to test the correctness of the optics parameters. The final numerical result showed that the algorithms can be well used in analyzing form error of ultra-precision aspheric lens which provided a theoretic base for evaluating the machining and compensation machining.更多还原