【摘要】 本讲座介绍了激光化学气相沉积的基本原理,较详细地讲述了制备金属薄膜、金刚石薄膜、类金刚石薄膜、氢化非晶硅薄膜、化合物半导体薄膜及绝缘体薄膜等所用的激光器、工艺参数以及薄膜的性能。更多还原

【Abstract】 The basic principles of laser chemical vapour deposition were introduced.The applied lasers,technological processes and properties of the deposited metal thin films,diamond thin films,diamond-like thin films,hydrogenated amorphous silicon thin films,compound semiconductor thin films and insulating thin films etc.were described in details.更多还原