【摘要】 在常规机械中很少考虑的微小静电力会对MEMS的电路产生一定影响,同时MEMS的元件在静电力作用下会发生变形,进而使得MEMS的几何结构和电容等产生变化,加之目前MEMS试制成本较高,因此,必须对整个系统的静电性能和机电性能进行分析。利用边界元素法,对MEMS各元件进行静电性能分析;采用有限元分析软件包对MEMS作机电性能分析,探讨了驱动电压与位移的关系、位移变化与电容的关系等。通过仿真测试发现,可提高设计质量,降低成本,缩短研制周期。更多还原

【Abstract】 Tiny electrostatic force in routine machinery may affect the MEMS circuit and deformation of MEMS component may happen due to the electrostatic force,thus leading to the change of the MEMS geometry structure and capacitance,and besides,the MEMS trial-production is costly at present.Therefore,the static electricity function and electromechanical function must be analyzed.The border element law is used to analyze every component’s static electricity function,and the finite element method is used to analyse the electromechanical function on MEMS.The relation between drive voltage and displacement,displacement change and capacitance etc.are discussed.更多还原