【摘要】 位置敏感探测器(PSD)以其分辨率高、时间响应性好的优点在光电检测领域得到了广泛的应用,但是PSD在生产过程中产生的非线性误差极大的影响了测量精度和范围,因此对PSD进行必要的非线性误差修正可以大大提高其测量精度和可靠性。更多还原

【Abstract】 Position sensitive detector is widely used in photoelectric detection field for its high resolution,good time responsibility,but the non-linearity error influences on the measuring accuracy and range greatly prouced in production.By correction of the error,the measuring accuracy and reliability can be improved greatly.更多还原