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氮气含量对CrN_x薄膜相结构及摩擦磨损性能的影响
Effect of nitrogen ratio on phase structure and tribological properties of CrN_x coating
【摘要】 采用电弧离子镀技术,在45钢基体上制备了不同氮气含量的CrNx薄膜。采用X射线衍射技术(XRD)、扫描电子显微镜(SEM)、努氏硬度计和UMT型球-盘摩擦试验机,分别测试了薄膜相结构、表面形貌、显微硬度和摩擦磨损性能。结果表明:CrNx薄膜主要由CrN和Cr2N相组成;随着N2含量的增加,薄膜中Cr2N(211)衍射峰强度逐渐减弱,CrN(220)衍射峰强度逐渐增强;薄膜表面颗粒逐渐减少,表面趋于平整,薄膜硬度出现两个峰值,对应于薄膜为单相Cr2N和CrN的相组成处;与钢基体相比,氮气含量为35%时,CrNx薄膜具有良好的表面质量、最佳的硬度、优良的耐磨损性能。
【Abstract】 CrNx coatings were deposited on the surface of 45 steel by arc ion plating method at various nitrogen ratios.The structure,surface morphology,microhardness and tribological properties of the CrNx coatings were investigated by XRD, SEM,Knoop hardness tester and UMT-2 pin on disk system,respectively.The results show that all the CrNx coatings are composes of CrN and Cr2N.With the increase of nitrogen ratios,the diffraction intensity of Cr2N(211) plane decreases whereas CrN(220) plane increases.Otherwise,the particles diminish and the surface tends to become smooth.In addition,two peak values appear in the curve of microhardness correspond to the single phase Cr2N and CrN,respectively.The CrNx coating deposited at the nitrogen ratio of 35% exhibits the optimization combination of surface quality,microhardness and wear resistance.
【Key words】 CrN_x coatings; arc ion plating; surface morphology; microhardness; tribological properties;
- 【文献出处】 材料热处理学报 ,Transactions of Materials and Heat Treatment , 编辑部邮箱 ,2007年03期
- 【分类号】TB43;TH873.6
- 【被引频次】37
- 【下载频次】569