【摘要】 利用CCD成像技术,设计出一种简单的测量垂直腔面发射激光器(VCSEL)的光束质量因子M2的方法。在注入电流分别为900mA,1500mA,3000mA和6000mA时,对出光孔径300μm,激射波长为980nm的垂直腔底面发射激光器的束腰等光束参数进行了测量,并应用激光光束传播的高斯方程拟合求得了M2因子的值分别为66,58,44和53。另外,当注入电流为900mA和3000mA时,对器件的远场分布进行了分析并测得了器件的远场发散角,测量值与理论计算值吻合较好。更多还原

【Abstract】 A simple method to measure the beam quality factor(M2) of high-power vertical-cavity surface-emitting laser(VCSEL) was designed by employing the charge coupled device(CCD) technology.When the injection currents were 900 mA,1500 mA,3000 mA and 6000 mA,respectively,the waists of a 980 nm bottom-emitting VCSEL with a 300 μm aperture were measured and the values of M2 were 66,58,44 and 53,respectively,which were calculated by Gauss fitting.In addition,far-field pattern was analyzed as the injection currents were 900 mA and 3000 mA.At the same time,far-field angles were measured and the values of them were in good agreement with the calculated value exactly.更多还原