【摘要】 在考虑了半球型固体浸没透镜(h-SIL)内部的反射,应用矢量衍射理论分析了色散对h-SIL的透射场特性的影响。对应不同波长的照明光,h-S1L的材料色散作用将对其透射场特性产生影响。h-SIL的分辨率、焦深和聚焦强度对照明光的波长变化非常敏感,都随着波长的变化成周期性的振荡。更多还原

【Abstract】 Considering the reflection inside the solid immersion lens,and using vector diffraction theory,the influences of dispersion to the transmitted field characters of hemisphere SIL(h-SIL) are analyzed.The transmitted field characters of h-SIL are affected by the material dispersion with illuminating lights of different wavelengths,The resolution,focal depth,focused intensity of h-SIL are sensitive to the change of wavelength and have a periodic oscillation whh the wavelength’s change.更多还原