【摘要】 本文采用脉冲激光沉积法(PLD)制备了ITO导电薄膜,并对其形貌、光学性质和电学性质进行了研究。结果表明,使用PLD方法制备的ITO导电薄膜在可见光区的平均透光率约为80%,方块电阻在100~200Ω/□之间。当衬底温度控制在300℃,氧压控制在1.33Pa时,可以得到具有较高透光率和电导率的ITO导电薄膜。更多还原

【Abstract】 ITO films were fabricated by pulsed laser deposition(PLD) method.Structure and optoelectrical properties of the deposited films were investigated.The average optical transmittance was 80% in the visible light range.The sheet resistance was about 100～200Ω/□.ITO films which were deposited by PLD at 300℃ and 1.33Pa of oxygen exhibited high optical transparency and conductivity.更多还原