【摘要】 研究了基于可编程多轴控制器运动控制卡的宏微两级精密定位控制系统,介绍了如何通过该控制卡的电路设计以达到对工作台的纳米级定位,并由实验验证了系统的可靠性。研究表明,该系统工作台的定位精度高。更多还原

【Abstract】 A precise macro/micro dual positioning controller system based on programmable multi-axes controller(PMAC) was researched.How to achieve nano-positioning with circuit designing of PMAC was introduced.Experiments showes that the positioning precision of working table is reliable,and positioning precision of working table is high.更多还原