【摘要】 随着系统小型化已不断的成为一种趋势,微小精密零部件在很多领域都显示出越来越广阔的应用前景。目前,多数微小精密零部件都是由大型超精密机床加工的,由于大型超精密机床成本高,并难以控制其外界环境,使得其加工成本很高,因此,研制了台式超精密车床。本文介绍了该车床关键部件的设计,包括空气主轴、进给机构、快速伺服刀架等。该机床精度达亚微米级,不仅促进了微小型产品的制造与研究,而且加速了制造业的发展。更多还原

【Abstract】 Because miniaturized system has been becoming a trend,micro/miniature components has more and more wide prospect in many fields.At present,most ultra-precision micro/miniature components are usually manufactured by large machine tools,of which the ambient environment is difficult to control,and the cost of machining is thus very high.A bench-type ultraprecision turning machine was developed,and the key technologies for the structural design of the main components,such as aerostatic spindle,feeding mechanism,fast tool servo,and so on,were introduced.The form accuracy is in the order of sub-micrometer or less.The development of this machine tool accelerates the manufacture and research of the micro products,and advances the manufacturing industry.更多还原