【摘要】 在适当的压力条件下,通过控制压制的温度,制作出性能优良的PC(Polycarbonate)聚合物矩形光栅,光栅压制模板为采用感应耦合等离子体(ICP)技术刻蚀的熔融石英矩形光栅模板.对聚合物光栅的衍射观察和测量,证明用模压技术制作的PC聚合物矩形光栅具有很好的衍射效率和表面质量.更多还原

【Abstract】 A method of making the grating with mould pressing technology on the polymer optics material is presented in this paper.Under the proper pressure and temperature,we have made out of PC(Polycarbonate) polymer rectangle gratings with good performance.The mask pattern is the melting quartz rectangle grating carved by ICP(Inductively Coupled Plasma) technology.By observing and measuring diffraction of the polymer grating,we prove that the PC polymer rectangle grating made in mould pressing technology has a higher diffraction efficiency and good surface quality.更多还原