【摘要】 针对晶体制造过程中晶体重量变化缓慢,且其制造过程中,现有称重系统准确度不够的问题,设计了一种在监测晶体生长过程中,重量变化的高精确度称重系统．采用高精确度称重传感器确保测量准确度,采用软件滤波的方法提高系统的抗干扰能力,同时通过系统上位机对晶体生长过程进行实时监控和重量曲线记录．更多还原

【Abstract】 Aiming at the problem that crystal weight varies slowly in manufacturing and present weighting sys- tems can not meet the request of precision and anti-interference capability,a weighting system with high precision is developed.Weight sensor with high precision is adopted to insure the testing veracity,software filter is used to improve the anti-interference capability,the process of crystal growth is monitored in real time and weight curve is recorded by host PC of the system.更多还原