【摘要】 以一种通过体微机械加工技术制备的音叉振动式微机械陀螺为对象,基于随机摄动技术定量研究了微机械陀螺固有频率变异的统计特征,以概率思想表达了微机械陀螺批量加工过程所带来的材料/尺寸随机误差对其各阶固有频率的影响。通过所提出的影响系数这一概念反映了微机械陀螺参数变异对固频变异的敏感度。在详尽分析微机械陀螺众多参数的影响系数的基础上,获得了微机械陀螺最为关键的6个参数。这有限关键参数的获得,不仅为微机械陀螺的健壮性设计提供了方向,同时也为实际微机械陀螺的加工控制提供了量化的可参考依据。更多还原

【Abstract】 Focusing on a tuning fork vibratory micromachined gy ro scope fabricated through silicon bulk micromachining, the matrix perturbation te chnology in the random finite element method is first introduced to analyses the statistical characteristics of the natural frequencies of tuning fork vibratory gyroscope.The influence of random material parameters and dimensional parameter s on the natural frequencies of a micromachined gyroscope are quantitatively de scribed by a so-called impact coefficient based on the probability theory.The impact coefficient exactly point out the sensitivity of parameter variance to n atural frequency variance and finally bring out the six key parameter of a micro gyroscope.The limited key parameters not only simplify the dimensions of design space for the robust optimization design of a microgyroscope, but also provide a special quantitative reference to the accuracy control in the fabrication proce dures of the microgyroscopes.更多还原