【摘要】 针对平板电容式静电驱动器受拉入(Pullin)现象影响其有效驱动行程仅为平板间初始间距的1/3的问题,设计了一种新的复合弹性梁结构,并分析了其对驱动器有效驱动行程的影响。通过分析发现,复合弹性梁的应用可以有效提高平板电容式静电驱动器的有效行程至2.09μm,达到初始间距的44%。更多还原

【Abstract】 According to the problem that the valid displacement is only 1/3 of initial gap between plates due to the influence of "pull in" phenomenon on the plate condenser gap actuator, a new kind of compound spring beam is designed, and the effect of the beam on the valid displacement of the actuator is analyzed. After analysis, it is found that the use of the compound spring beam can increase the valid displacement of the plate condenser actuator to 2.09μm, i.e. 44% of initial gap.更多还原