【摘要】 通过对玻璃、陶瓷、金属3个试件进行超精密加工,使试件表面粗糙度达到纳米级,采用非破坏性的X射线衍射sin2ψ法测量原理对不同试件的残余应力进行了测试研究。结果表明:在本试验条件下,3个试件都只存在残余压应力,并且陶瓷的残余压应力最大,金属残余压应力最小。更多还原

【Abstract】 The residual stress on the precision machining surface of glass ceramic and metal was measured by using X-ray diffraction method.The roughness of super precision machining surface reached nanometer level.The results showed that the residual stress of three workpiece was compressive,and the ceramic residual stress is the largest,the metal is smallest.更多还原