【摘要】 通过分析滚珠丝杠驱动机构的特点,对目前利用这种驱动方式实现大行程的具有纳米分辨率的定位系统的关键技术进行论述。更多还原

【Abstract】 Ballscrew driven mechanism is widely used in precision and ultra-precision machine tools.Base on understanding of characteristics of ballscrew,the positioning systems with ballscrew for long stroke positioning with nanometer resolution are reviewed.更多还原